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| Facility
>> Beamlines >> LiMiNT |
Contact: Userdesk (slsuserdesk@nus.edu.sg)
The
micro- and nano-manufacturing facility at SSLS
offers (deep) x-ray lithography to the scientific and commercial high-tech
community in Singapore and the region.
SSLS is providing all_process_steps
for prototyping of micro- and nanodevices, starting from pattern design, over mask fabrication,
lithography, electroforming to plastic moulding.
The LiMiNT_beamline
thereby plays a vital role as its x-ray scanner makes SSLS a unique micro-
and nanotechnology lab in South East Asia. The deep, unscattered penetration of x-rays through resist
materials allows the fabrication of microstructures with very high aspect
ratios (LIGA technology)
on the one hand while, on the other, the short wavelength of the x-rays
enables batch fabrication of nanostructures on wafer level (e.g. super-resolution_process).
SSLS is working with groups from local and overseas universities and institutes
as well as industry on several projects in the fields of biotechnology,
polymer processing, X-ray and microoptics, and microfluidics.
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