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15 March 2002 SSLS
has made its first X-ray proximity lithography exposures at the LiMiNT
beam line using a test mask provided by SSLS' strategic partner CAMD,
Baton Rouge, Louisiana. LiMiNT stands for Lithography for Micro- and Nanotechnology.
Beam line and scanner were delivered and installed by Oxford Danfysik
in December 2001. The full white spectrum of Helios 2 is used, only filtered
by two Be windows of total thickness of 400 µm. There are no mirrors
in the beam line. The useful spectral flux at the sample covers a bandwidth
from 2 to 10 keV delivering a power of 0.9 W to the 4" wafer at an
electron current of 300 mA.
21 January 2002 The 3rd International Conference on Synchrotron Radiation in Materials Science (SRMS-3) was hosted and organised by SSLS from 21 to 24 January 2002 in Singapore. 190 participants from 24 countries and 4 continents gathered in the Shangri-La Hotel to present 170 papers, 30 of them invited. The broad range of topics covered was another demonstration of the almost ubiquitous use of synchrotron radiation methods. It spanned from high-energy diffraction to far infrared spectroscopy, from magnetic scattering to industrial applications, from the latest on 3rd generation storage ring sources to X-ray Free Electron laser projects, and from large to small storage rings. Synchrotron radiation based materials science is obviously in good shape.
Using
the Phase Contrast Imaging beam line at SSLS a group lead by Dr. Yeukuang
Hwu of Academia Sinica, Taiwan, has produced first images of various samples
including insects, plants, and foodstuff. The beam line provides the white
spectrum of Helios 2 (characteristic photon energy 1.5 keV) filtered by
a Be window of 400 µm thickness. On passing through the sample the
spatial intensity distribution of the X-ray beam over its cross section
is modulated. X-rays are then converted to visible light by a scintillator
foil and recorded by means of a high-resolution CCD camera. The picture
shows a local insect.
SSLS received a new grant from Science and Engineering Research Council (SERC), National Science and Technology Board (NSTB). The grant will provide SSLS with funds to -
build a new beam line for infrared spectro/microscopy, This
will go a long way in speeding up research and development at SSLS significantly. |
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©
Copyright 2002 Singapore Synchrotron Light Source. All Rights Reserved.
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