15 March 2002

SSLS has made its first X-ray proximity lithography exposures at the LiMiNT beam line using a test mask provided by SSLS' strategic partner CAMD, Baton Rouge, Louisiana. LiMiNT stands for Lithography for Micro- and Nanotechnology. Beam line and scanner were delivered and installed by Oxford Danfysik in December 2001. The full white spectrum of Helios 2 is used, only filtered by two Be windows of total thickness of 400 µm. There are no mirrors in the beam line. The useful spectral flux at the sample covers a bandwidth from 2 to 10 keV delivering a power of 0.9 W to the 4" wafer at an electron current of 300 mA.
The picture shows various cylindrical test devices made in 200 µm high SU-8 resist. Aspect ratio is up to 50.
SSLS is working with groups from local and overseas universities and institutes as well as industry on several projects in the fields of biotechnology, polymer processing, X-ray and microoptics, and microfluidics.

SEM photos of microstructures in 200 µm SU-8 resist

21 January 2002

The 3rd International Conference on Synchrotron Radiation in Materials Science (SRMS-3) was hosted and organised by SSLS from 21 to 24 January 2002 in Singapore. 190 participants from 24 countries and 4 continents gathered in the Shangri-La Hotel to present 170 papers, 30 of them invited. The broad range of topics covered was another demonstration of the almost ubiquitous use of synchrotron radiation methods. It spanned from high-energy diffraction to far infrared spectroscopy, from magnetic scattering to industrial applications, from the latest on 3rd generation storage ring sources to X-ray Free Electron laser projects, and from large to small storage rings. Synchrotron radiation based materials science is obviously in good shape.

11 October 2001

Using the Phase Contrast Imaging beam line at SSLS a group lead by Dr. Yeukuang Hwu of Academia Sinica, Taiwan, has produced first images of various samples including insects, plants, and foodstuff. The beam line provides the white spectrum of Helios 2 (characteristic photon energy 1.5 keV) filtered by a Be window of 400 µm thickness. On passing through the sample the spatial intensity distribution of the X-ray beam over its cross section is modulated. X-rays are then converted to visible light by a scintillator foil and recorded by means of a high-resolution CCD camera. The picture shows a local insect.
SSLS is developing the PCI facility to deliver time-resolved microscopic images of the bulk of samples that are sufficiently transparent for the up to 10 keV photons of Helios 2. Current areas of interest are the medical and biosciences, microtechnology, polymer processing, and food science and technology.

Head, thorax, and legs of a local ant (actual size 10x6 mm)

10 October 2001

SSLS received a new grant from Science and Engineering Research Council (SERC), National Science and Technology Board (NSTB).

The grant will provide SSLS with funds to

- build a new beam line for infrared spectro/microscopy,
- set up process equipment needed for micro/nano manufacturing and
- cover for the infrastructure embedding beam lines and experimental systems.

This will go a long way in speeding up research and development at SSLS significantly.